Wednesday, April 14, 2010
Fwd: MEMS-talk Digest, Vol 90, Issue 9
From: <mems-talk-request@memsnet.org>
Date: Tue, Apr 13, 2010 at 11:00 AM
Subject: MEMS-talk Digest, Vol 90, Issue 9
To: mems-talk@memsnet.org
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Today's Topics:
1. wet chemical silicon etch with photoresist mask (10um)
(Robert MacDonald)
---------- Forwarded message ----------
From: Robert MacDonald <robm@shearwaterscientific.com>
To: mems-talk@memsnet.org
Date: Mon, 12 Apr 2010 00:09:49 -0800
Subject: [mems-talk] wet chemical silicon etch with photoresist mask (10um)
Does anyone know of a reliable wet chemical silicon etch (isotropic or anisotropic) which can be masked by photo resist? I need to etch down 10um.
Rob MacDonald
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Fwd: MEMS-talk Digest, Vol 90, Issue 10
From: <mems-talk-request@memsnet.org>
Date: Wed, Apr 14, 2010 at 11:00 AM
Subject: MEMS-talk Digest, Vol 90, Issue 10
To: mems-talk@memsnet.org
Send MEMS-talk mailing list submissions to
mems-talk@memsnet.org
To subscribe or unsubscribe via the World Wide Web, visit
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
or, via email, send a message with subject or body 'help' to
mems-talk-request@memsnet.org
You can reach the person managing the list at
mems-talk-owner@memsnet.org
When replying, please edit your Subject line so it is more specific
than "Re: Contents of MEMS-talk digest..."
Today's Topics:
1. Remove TDTS cover from wafer? (Lukas Bogunovic)
---------- Forwarded message ----------
From: Lukas Bogunovic <bogunovic@physik.uni-bielefeld.de>
To: mems-talk@memsnet.org
Date: Wed, 14 Apr 2010 12:43:21 +0200
Subject: [mems-talk] Remove TDTS cover from wafer?
Hi folks,
i have a question concerning
Tridecafluor-1,1,2,2-tetra-hydrooctyl-trichlorosilane (TDTS).
Before we do softlithography with PDMS, our wafers are covered with
vapour of this chemical. Sometimes, there are wafers that are not needed
anymore. without the tdts the su-8 structures on it can be easyly
removed with Caro's acid. That doesn't work for TDTS covered wafers -
they are highly resistant. Does anyone know how to remove this silane,
so that the wafer can be reused?
Thanks in advance!
Lukas Bogunovic
Bielefeld University - Biophysics and applied Nanoscience
Germany
bogunovic@physik.uni-bielefeld.de
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
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Fwd: You can now 3D print in glass with Shapeways
From: Shapeways <Shapeways@mail.vresp.com>
Date: Wed, Apr 14, 2010 at 9:33 AM
Subject: You can now 3D print in glass with Shapeways
To: technologiclee@gmail.com
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