Fwd: MEMS-talk Digest, Vol 90, Issue 10

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From: <mems-talk-request@memsnet.org>
Date: Wed, Apr 14, 2010 at 11:00 AM
Subject: MEMS-talk Digest, Vol 90, Issue 10
To: mems-talk@memsnet.org


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Today's Topics:

  1. Remove TDTS cover from wafer? (Lukas Bogunovic)


---------- Forwarded message ----------
From: Lukas Bogunovic <bogunovic@physik.uni-bielefeld.de>
To: mems-talk@memsnet.org
Date: Wed, 14 Apr 2010 12:43:21 +0200
Subject: [mems-talk] Remove TDTS cover from wafer?
Hi folks,

i have a question concerning
Tridecafluor-1,1,2,2-tetra-hydrooctyl-trichlorosilane (TDTS).

Before we do softlithography with PDMS, our wafers are covered with
vapour of this chemical. Sometimes, there are wafers that are not needed
anymore. without the tdts the su-8 structures on it can be easyly
removed with Caro's acid. That doesn't work for TDTS covered wafers -
they are highly resistant. Does anyone know how to remove this silane,
so that the wafer can be reused?

Thanks in advance!

Lukas Bogunovic
Bielefeld University - Biophysics and applied Nanoscience
Germany
bogunovic@physik.uni-bielefeld.de


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