Fwd: MEMS-talk Digest, Vol 90, Issue 9

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From: <mems-talk-request@memsnet.org>
Date: Tue, Apr 13, 2010 at 11:00 AM
Subject: MEMS-talk Digest, Vol 90, Issue 9
To: mems-talk@memsnet.org


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Today's Topics:

  1. wet chemical silicon etch with photoresist mask (10um)
     (Robert MacDonald)


---------- Forwarded message ----------
From: Robert MacDonald <robm@shearwaterscientific.com>
To: mems-talk@memsnet.org
Date: Mon, 12 Apr 2010 00:09:49 -0800
Subject: [mems-talk] wet chemical silicon etch with photoresist mask (10um)
Does anyone know of a reliable wet chemical silicon etch (isotropic or anisotropic) which can be masked by photo resist? I need to etch down 10um.

Rob MacDonald




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